Capacitive inertial sensing at high temperatures of up to 400 </ce:hsp>°C

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Capacitive inertial sensing at high temperatures of up to 400 ce:hsp>°C

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作者：Mikhail Asiatici^a ; ^b ; ^{mikhail.asiatici@ee.kth.se" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Andreas C. Fischer^a ; ^c ; ^{andreas.fischer@ee.kth.se" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Henrik Rö ; djegå ; rd^d ; ^{henrik.rodjegard@senseair.se" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Sjoerd Haasl^a ; ^{sjoerd.haasl@sth.kth.se" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Gö ; ran Stemme^a ; ^{goran.stemme@ee.kth.se" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Frank Niklaus^a ; ^{frank.niklaus@ee.kth.se" class="auth_mail" title="E-mail the corresponding author}Author Vitae
关键词：High temperature ; Harsh environment ; Inertial sensors ; Capacitive detection ; Accelerometer
刊名：Sensors and Actuators A: Physical
出版年：2016
出版时间：1 February 2016
年：2016
卷：238
期：Complete
页码：361-368
全文大小：1465 K

文摘

class="label">•: Capacitive inertial sensing has been demonstrated at temperatures of up to 400 °C.
class="label">•: A static model of the silicon capacitive accelerometer has been developed.
class="label">•: Static sensor drift is ascribed to changes in the Young's modulus of the Si spring.
class="label">•: Dynamic sensor drift is ascribed to changes in gas properties in the cavity.

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