A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

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A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

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作者：Habib Bilgin^a ; ¹Author Vitae ; Shahrzad Zahertar^a ; ¹Author Vitae ; Seyedehayda Sadeghzadeh^aAuthor Vitae ; Arda D. Yalcinkaya^a ; ^bAuthor Vitae ; Hamdi Torun^a ; ^b ; ^{hamdi.torun@boun.edu.tr" class="auth_mail" title="E-mail the corresponding author}Author Vitae
关键词：MEMS ; Terahertz technology ; Metamaterials ; Microfabrication ; Optical readout
刊名：Sensors and Actuators A: Physical
出版年：2016
出版时间：15 June 2016
年：2016
卷：244
期：Complete
页码：292-298
全文大小：2121 K

文摘

•: We developed a novel MEMS-based terahertz detector with metamaterial-based absorbers.
•: We fabricated the detectors made of Parylene and titanium using microfabrication techniques.
•: We characterized the absorption characteristics of the metamaterials using a terahertz timedomain spectroscope.
•: We implemented a diffraction grating interferometer at pixel level for the detectors and present the experimental characteristics of the readout method.

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