Annealing effects in ITO based ceramic thin film thermocouples

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• 作者：Xiaohui Zhao ; ^{xhzhao@uestc.edu.cn} ; Haitao Li ; Ke Yang ; Shuwen Jiang ; Hongchuan Jiang ; Wanli Zhang
• 关键词：ITO ; Thin-film thermocouples ; XPS ; Oxynitride ; Annealing
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：25 March 2017
• 年：2017
• 卷：698
• 期：Complete
• 页码：147-151
• 全文大小：1091 K
• 卷排序：698

文摘

The annealing effects on ITON and InON films were investigated. Metastable nitrides were formed in as-deposited ITON and InON films. Most nitrides were transformed into oxynitrides after N2-Air annealing. The linearity and high temperature stability of ITO based TFTC was improved.