The effect of carbon content on the phase structure of amorphous/nanocrystalline Ge_{1 − x}C_x films prepared by PECVD

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• 作者：Hossein Jamali ; ^{h.jamali@mut-es.ac.ir} ; Reza Mozafarinia ; Akbar Eshaghi
• 关键词：Ge1  ; &minus ;   ; xCx ; Amorphous/nanocrystalline ; Phase structure ; PECVD
• 刊名：Surface and Coatings Technology
• 出版年：2017
• 出版时间：25 January 2017
• 年：2017
• 卷：310
• 期：Complete
• 页码：1-7
• 全文大小：1181 K
• 卷排序：310

文摘

The role of C content on phase structure of Ge1 − xCx films was investigated. Amorphous/nanocrystalline Ge1 − xCx films were a type of composite material. By increasing the C content, the crystallinity degree of films was decreased.