id="pr0010">New effect of heat outflow from substrate when magnetron is on was discovered.
dd><dt class="label">•dt><dd>
id="pr0020">This new effect is linear in terms of heat outflow rate to target current ratio.
dd><dt class="label">•dt><dd>
id="pr0030">Kinetic equation for heating process additively considers this effect.
dd>dl>
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