Plasma immersion ion implantation as a technique in duplex and hybrid processing

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• 作者：Matthews ; Allan ; Leyland ; Adrian ; Wilson ; Andrew
• 关键词：Plasma immersion implantation ; Surface modification ; Ion implantation ; DLC ion-assisted deposition
• 刊名：Vacuum
• 出版年：2002
• 出版时间：October 14, 2002
• 年：2002
• 卷：68
• 期：1
• 页码：57-64
• 全文大小：294 K

文摘

Plasma immersion ion implantation is a relatively new surface treatment process which offers considerable flexibility to modify the properties of a very wide range of materials. Here we discuss the use of the technique as a means of reducing the sliding friction and improving the galling resistance of stainless steel, via a combined plasma-immersion ion assisted deposition (PIAD) method for DLC. Its use in combination with the surface hardening technique known as plasma electrolytic oxidation to produce low friction surfaces on aluminium alloys is also discussed. The PIAD technique is also shown to be beneficial for the treatment and coating of polymeric materials to enhance their wear resistance in sliding contacts against steel. A further novel use of the method is shown to be the combination of PIAD DLC coating with a plasma electrolytic nitrocarburising process for stainless steels.