The initial oxidation behaviors of uranium nitride UNx (x = 0, 0.23, 0.68, 1.66) films
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文摘
The initial oxidation behaviors of uranium nitride films with different N/U ratios have been focused in the present work. Uranium nitride films with different nitrogen content, UNx (x = 0, 0.23, 0.68, 1.66), have been prepared on the Si substrate by radio frequency magnetron sputtering method. The experimental results showed that the UNx (x = 0, 0.23, 0.68, 1.66) films were fine and dense. The initial oxidation processes of uranium nitride films were investigated in an ultra-high vacuum chamber of Auger electron spectroscopy. After 105 L oxygen exposure, the oxide layer of UO2 were formed on the surface of U, and UN0.23, UN0.68 films formed UO2 with little UNxOy, while the UN1.66 film generated UNxOy oxide layer. UN1.66 film exhibited the thinnest oxide layer and provided the best considerable protection against oxygen attack. Also, the AES transition lines of UNxOy were identified for the first time.
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