Nano-scratch testing of (Ti,Fe)N_x thin films on silicon

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• 作者：B.D. Beake^a ; ^{ben@micromaterials.co.uk} ; V.M. Vishnyakov^b ; A.J. Harris^a
• 关键词：Crack resistance ; Protective coatings ; Nano-scratch ; Soft inclusions ; H3/E2
• 刊名：Surface and Coatings Technology
• 出版年：2017
• 出版时间：15 January 2017
• 年：2017
• 卷：309
• 期：Complete
• 页码：671-679
• 全文大小：1082 K
• 卷排序：309

文摘

Maximum critical load in nano-scratch test at intermediate H/E and H3/E2 Mechanical properties influence failure mechanism by altering the stresses developed. High tensile stresses develop on very hard coatings resulting in delamination. Investigation of the load dependence of friction in the nano-scratch test Ploughing, load support and indenter geometry all influence the measured friction.