Integrated pre-concentrator gas sensor microsystem for ppb level benzene detection

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Integrated pre-concentrator gas sensor microsystem for ppb level benzene detection

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作者：Martin Leidinger^a ; ^{m.leidinger@lmt.uni-saarland.de" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Max Rieger^b ; ^{max.rieger@ict.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Tilman Sauerwald^a ; ^{t.sauerwald@lmt.uni-saarland.de" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Christine Alé ; pé ; e^c ; ^{christine.alepee@sgxsensortech.com" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Andreas Schü ; tze^a ; ^{schuetze@lmt.uni-saarland.de" class="auth_mail" title="E-mail the corresponding author}Author Vitae
关键词：Gas pre-concentration ; Metal-organic frameworks ; Integrated gas sensor system ; Metal oxide semiconductor gas sensor ; Indoor air quality ; FEM simulation
刊名：Sensors & Actuators: B. Chemical
出版年：2016
出版时间：29 November 2016
年：2016
卷：236
期：Complete
页码：988-996
全文大小：1698 K

文摘

•: Metal-organic frameworks (MOFs) as materials for gas pre-concentration.
•: MOF characterization via inverse gas chromatography and mass spectroscopy.
•: Design of integrated pre-concentrator gas sensor microsystems.
•: FEM simulations of system performance.
•: Verification of significant gas pre-concentration in test measurements.

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