Correlation study of structural, optical and electrical properties of amorphous carbon thin films prepared by ion beam sputtering deposition technique

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Correlation study of structural, optical and electrical properties of amorphous carbon thin films prepared by ion beam sputtering deposition technique

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作者：E. Mohagheghpour^a ; M. Rajabi^a ; ^{mrajabi@irost.ir" class="auth_mail" title="E-mail the corresponding author} ; R. Gholamipour^a ; M.M. Larijani^b ; S. Sheibani^b
关键词：Amorphous carbon (a-C) ; Ion beam sputtering deposition ; Electrical resistivity ; Optical band gap ; Photoluminescence ; Film thickness
刊名：Applied Surface Science
出版年：2016
出版时间：1 January 2016
年：2016
卷：360
期：part_PA
页码：52-58
全文大小：1740 K

文摘

•: Deposition of amorphous carbon thin films on glass substrate by ion beam sputtering deposition technique.
•: Characterization of Structural, Optical and electrical properties of amorphous carbon thin films.
•: Studying the correlation exists between structural, optical and electrical properties.

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