Evaluation and criterion determination of the low-k thin film adhesion by the surface acoustic waves with cohesive zone model

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• 作者：Xia Xiao^a ; ^{xiaxiao@tju.edu.cn} ; Haiyang Qi^a ; Xiaole Sui^a ; Takamaro Kikkawa^b
• 关键词：Adhesion ; Adhesion criterion ; Surface acoustic waves ; Cohesive zone model ; Low-k film
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：31 March 2017
• 年：2017
• 卷：399
• 期：Complete
• 页码：599-607
• 全文大小：1929 K
• 卷排序：399

文摘

The parameter σmax/δnσmax/δn is proposed to investigate the adhesion property quantitatively. The variations of maximum interface stress show saturation trend as a function of σmax/δnσmax/δn. The 95% of the saturation value is suggested to determine the adhesion criterion. The samples are judged by the CZM-SAW technique and compared with the nanoscratch. The CZM-SAW could be a universal method to characterize the interfacial adhesion.