A thin PDMS nozzle/diffuser micropump for biomedical applications
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文摘
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A 1-mm-thick PDMS nozzle/diffuser micropump with an in-plane inlet and outlet is presented.

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The micropump is fabricated with micromachining and casting.

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A flow rate of 135 μL/min and a backpressure of 25 mmH2O are produced.

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Duty cycle of the micropump is investigated and discussed for the first time.

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