A low temperature co-fired ceramic based microfluidic Clark-type oxygen sensor for real-time oxygen sensing

详细信息    查看全文

• 作者：Jin Luo^a ; ^b ; ^{jluuky2014@sina.com}Author Vitae ; Thomas Dziubla^aAuthor Vitae ; Richard Eitel^c ; ^{reitel@stevens.edu}Author Vitae
• 关键词：Clark-type ; Oxygen sensor ; LTCC ; Proton conductive electrolyte ; Electrochemistry
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：240
• 期：Complete
• 页码：392-397
• 全文大小：1182 K
• 卷排序：240

文摘

A solid state Nafion electrolyte and PDMS gas permeable membrane was successfully integrated into an LTCC package. The resulting accomplishment enables realization of an integrated microfluidic Clark-type oxygen sensor. The developed device was capable of oxygen delivery and real-time detection of dissolved oxygen in a flowing medium.