Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator

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• 作者：Takashi Mineta^a ; ^{mineta-t@yz.yamagata-u.ac.jp} ; Kenta Kawashima^a ; Ryoga Taguchi^b
• 关键词：Dual AFM cantilever ; FePd thin film ; Magneto-strictive effect ; Dual silicon tip
• 刊名：Microelectronic Engineering
• 出版年：2017
• 出版时间：25 January 2017
• 年：2017
• 卷：168
• 期：Complete
• 页码：45-49
• 全文大小：1916 K
• 卷排序：168

文摘

A dual AFM probe with twin Si tips and cantilevers was fabricated. A 600 nm-gapped dual Si tip was fabricated through a self-aligning etching process. Fe60Pd40 (1 μm)/Si (2 μm) twin cantilevers were orthogonally located to each other. Each cantilever was individually deflected by magneto-striction for switching. The 1 μm-thick Fe60Pd40 film could generate magneto-striction above 250 ppm.