Eigenanalysis of morphological diversity in silicon random nanostructures formed via resist collapse

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Eigenanalysis of morphological diversity in silicon random nanostructures formed via resist collapse

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作者：Makoto Naruse^a ; ^{naruse@nict.go.jp" class="auth_mail" title="E-mail the corresponding author} ; Morihisa Hoga^b ; ^{houga-m@mail.dnp.co.jp" class="auth_mail" title="E-mail the corresponding author} ; Yasuyuki Ohyagi^b ; ^{Ooyagi-Y@mail.dnp.co.jp" class="auth_mail" title="E-mail the corresponding author} ; Shumpei Nishio^b ; ^{nishio-s3@mail.dnp.co.jp" class="auth_mail" title="E-mail the corresponding author} ; Naoya Tate^c ; ^{tate@ed.kyushu-u.ac.jp" class="auth_mail" title="E-mail the corresponding author} ; Naoki Yoshida^d ; ^{yoshida-naoki-dk@ynu.jp" class="auth_mail" title="E-mail the corresponding author} ; Tsutomu Matsumoto^d ; ^e ; ^{tsutomu@ynu.ac.jp" class="auth_mail" title="E-mail the corresponding author}
关键词：Artifact metrics ; Nanoscale morphology ; Eigenanalysis ; Measurement stability ; Information security ; Resist collapse
刊名：Physica A: Statistical Mechanics and its Applications
出版年：2016
出版时间：15 November 2016
年：2016
卷：462
期：Complete
页码：883-888
全文大小：1733 K

文摘

•: Eigenanalysis of random nanostructures reveals identities’ capacity.
•: Unified model considers morphological diversity and measurement stability.
•: Nanoscale morphology exhibits great potential for security applications.
•: The proposed eigenanalysis strategy is applicable to other material architectures.

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