Study of plasma–solid interaction in electronegative gas mixtures at higher pressures

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• 作者：Rudolf Hrach ; Š ; tě ; pá ; n Rouč ; ka ; Vě ; ra Hrachová ; Luká ; š ; Schmiedt
• 关键词：Low-temperature plasma ; Plasma– ; solid interaction ; Medium pressures ; Computer simulation
• 刊名：Vacuum
• 出版年：2009
• 出版时间：25 August 2009
• 年：2009
• 卷：84
• 期：1
• 页码：94-96
• 全文大小：252 K

文摘

Surface treatment at higher pressures has become an important issue of plasma science and technology. The analysis of processes in such plasmas is now often based on computer modelling; however, the main problem of simulation in medium and higher pressures is the increasing number of collisions among plasma particles and because of this, decreasing efficiency of simulations. A combination of experimental and computational approaches was used for the study of this problem in the present work. The measurements were performed in the positive column of a DC glow discharge in oxygen, both pure and in mixtures with rare gases, at medium pressures. These experiments were completed by computer simulations, where an attempt was made to extend the particle simulation technique to higher pressures. It was shown that the standard Particle-In-Cell/Monte Carlo simulation technique loses its applicability at higher pressures and must be replaced by more sophisticated computational methods. In the present work new algorithms for particle treatment in plasma at higher pressures were suggested and successfully tested.