Cantilever optimization for applications in enhanced harmonic atomic force microscopy

详细信息    查看全文

• 作者：Weijie ZhangAuthor Vitae ; Yuhang Chen ; ^{chenyh@ustc.edu.cn}Author Vitae ; Jiaru ChuAuthor Vitae
• 关键词：Atomic force microscopy ; Harmonic imaging ; Cantilever design ; Material contrast ; Focused ion beam etching
• 刊名：Sensors and Actuators A: Physical
• 出版年：2017
• 出版时间：1 March 2017
• 年：2017
• 卷：255
• 期：Complete
• 页码：54-60
• 全文大小：3541 K
• 卷排序：255

文摘

A cantilever was optimized for enhanced AFM harmonic imaging. Optimizations were carried out to satisfy multi-objectives. Image contrast to material difference was improved at least 3 times. Experiments and analysis ascertain the improvement of sensitivity.