Surface modification of single crystal LiTaO₃ by H and He implantation

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• 作者：Changdong Ma^a ; ^b ; Fei Lu^b ; ^{lufei@sdu.edu.cn} ; Lei Jin^c ; Bo Xu^b ; Ranran Fan^b
• 关键词：Ions coimplantation ; LiTaO3 single crystal ; Surface blistering
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：392
• 期：Complete
• 页码：62-66
• 全文大小：1467 K
• 卷排序：392

文摘

Hydrogen and helium ions coimplantation on blistering of the Z-cut LiTaO3 surface is experimentally analyzed. The accumulated lattice damage in He-first sample is significantly larger than that of H-first sample. Blistering or splitting of LiTaO3 surface is more easily achieved by He− first in coimplantation. Chemical bonding between H ions and O atoms forming of O-H structure is analyzed by infrared spectroscopy.