Modelling the dynamic response of a micro-cantilever excited at its base by an arbitrary thermal input using Laplace transformation

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• 作者：M. Komeili ^{mojtaba.komeili@gmail.com} ; C. Menon ; ^{carlo_menon@sfu.ca}
• 关键词：Micro-Electro-Mechanical Systems (MEMS) ; Micro-cantilever beam ; Transient response ; Thermal excitation ; Laplace transformation ; Numerical inverse Laplace
• 刊名：Applied Mathematical Modelling
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：43
• 期：Complete
• 页码：481-497
• 全文大小：1675 K
• 卷排序：43

文摘

Analytical modeling of a micro-cantilever mounted on an actuation base. Developing the coupled thermo-mechanical model for thermal actuation of the micro-cantilever. Investigating different numerical inverse Laplace transformation methods in solving the formed partial differential equation. Effect of periodic excitation signals on the performance of the system.