A reflective mirror microcantilevers-based biosensor for biochemical detection

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• 作者：Feng Wen^a ; ^b ; ^{nucwenfeng@163.com" class="auth_mail" title="E-mail the corresponding author} ; Yuejin Zhao^b ; Xiaomei Yu^c ; Yongfeng Ren^a
• 关键词：Optics ; Reflective mirror ; Microcantilever ; Biosensor ; Biochemical detection
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2016
• 出版时间：February 2016
• 年：2016
• 卷：127
• 期：4
• 页码：2173-2176
• 全文大小：1176 K

文摘

A biosensor with mirror microcantilevers, based on silicon-on-insulator (SOI) was designed and fabricated for biochemical detection. For measuring the extremely low deflections of the microcantilevers, a high precision optical readout approach based on a fiber optical reflective light intensity readout approach were presented. The results demonstrate that microcantilever biosensor has very high sensitivity of 6.26908 mV/nm, and the measurement resolution is up to 0.1998 nm. In the practical measure glucose solution concentration experiments, the results demonstrate that the sensitivity is up to 1.19 mV/μg/ml.