刊名:Physica E: Low-dimensional Systems and Nanostructures
出版年:2017
出版时间:February 2017
年:2017
卷:86
期:Complete
页码:164-167
全文大小:547 K
卷排序:86
文摘
IGZO thin films were deposited by ultrasonic spray pyrolysis. Films were grown at different substrate temperatures (425, 450 and 475 °C). Structural, morphological, optical and electrical properties were studied. Films showed transmittance >70% and minimum resistivity ~10.5×10−3 Ω cm.
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