Atomic force microscopy characterization of the chemical contrast of nanoscale patterns fabricated by electron beam lithography on polyethylene glycol oxide thin films

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• 作者：Lucel Sirghi ; Frederic Bretagnol ; Sté ; phane Mornet ; Takao Sasaki ; Douglas Gillil ; Pascal Colpo ; Francois Rossi
• 关键词：Electron beam lithography ; Friction force microscopy ; Polyethylene glycol oxide
• 刊名：Ultramicroscopy
• 出版年：2009
• 出版时间：February 2009
• 年：2009
• 卷：109
• 期：3
• 页码：222-229
• 全文大小：908 K

文摘

The present paper shows that atomic force microscopy (AFM) imaging of friction force and phase lag in ambient air can be used to characterize the chemical contrast induced by electron beam (EB) irradiation on polyethylene glycol oxide (PEO) surface. Time-of-flight secondary emission mass spectroscopy measurements showed that the EB irradiation generates chemical contrast on PEO surface by decreasing the ether bond density. The AFM measurements showed smaller phase lag and lower friction and adhesive forces on the EB irradiated PEO surface, as compared to the non-irradiated PEO surface. While the chemical contrast in friction force had a linear dependence on the EB irradiation dose, the dependence of the chemical contrast in the phase lag was strongly non-linear. As the friction and adhesive forces depended on the AFM probe hydrophilicity and air humidity, the contrast in friction and adhesive forces is ascribed to different capillary condensation of ambient water vapour at the AFM tip contact with the EB irradiated and non-irradiated PEO surfaces, respectively.