Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

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• 作者：Olaf Zywitzki ; ^{olaf.zywitzki@fep.fraunhofer.de} ; Thomas Modes ; Stephan Barth ; Hagen Bartzsch ; Peter Frach
• 关键词：Aluminum scandium nitride films ; Pulse magnetron sputtering ; Structure ; Piezoelectric properties ; Young's modulus
• 刊名：Surface and Coatings Technology
• 出版年：2017
• 出版时间：15 January 2017
• 年：2017
• 卷：309
• 期：Complete
• 页码：417-422
• 全文大小：1613 K
• 卷排序：309

文摘

AlxSc1-xN films with high piezoelectric coefficient are deposited by pulse magnetron sputtering without substrate heating For 35 to 43% scandium content a relative broad range of piezoelectric coefficients could be detected Reduced elastic stiffness and higher polarity of the distorted wurtzite structure A substrate temperature below 300 °C seems to beneficial for good piezoelectric properties