Monolithic integration of low-pass filters with ESD protections on p<sup>+</sup> silicon/porous silicon substrates

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Monolithic integration of low-pass filters with ESD protections on p⁺ silicon/porous silicon substrates

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作者：Marie Capelle^b ; Jé ; rô ; me Billoue^a ; ^{jerome.billoue@univ-tours.fr" class="auth_mail" title="E-mail the corresponding author} ; Joë ; l Concord^b ; Patrick Poveda^b ; Gaë ; l Gautier^a
关键词：Porous silicon ; Local porous silicon region ; RF filter ; ESD protection
刊名：Solid State Electronics
出版年：2016
出版时间：February 2016
年：2016
卷：116
期：Complete
页码：12-14
全文大小：707 K

文摘

•: Porous silicon/silicon hybrid substrates realized for industrial device integration.
•: Monolithic integration of active and passive devices for RF function.
•: Electrical characterization of fully functional ESD diodes.
•: Improvement of RF noise rejection versus original product on bulk silicon.

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