A micro-machined differential resonance accelerometer based on silicon on quartz method

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• 作者：Cun LiAuthor Vitae ; Yulong Zhao ; ^{zhaoyulong@mail.xjtu.edu.cn}Author Vitae ; Bo LiAuthor Vitae ; Rongjun ChengAuthor Vitae ; Dengqiang SunAuthor Vitae ; Chao HanAuthor Vitae ; You ZhaoAuthor Vitae
• 关键词：Resonance accelerometer ; Quartz DETF ; Silicon on quartz (SOQ) ; Differential structure
• 刊名：Sensors and Actuators A: Physical
• 出版年：2017
• 出版时间：1 January 2017
• 年：2017
• 卷：253
• 期：Complete
• 页码：1-9
• 全文大小：2349 K
• 卷排序：253

文摘

The micro-machined resonance accelerometer in differential configuration working in air is proposed, modeled and characterized. SOQ (silicon on quartz) method is introduced in the sensor, which combines the silicon spring-mass and quartz double ended tuning fork (Q-DETF) resonator. Piezoelectricity of quartz material is used in the driving and sensing of the resonator. Dual Q-DETFs are bonded in the same plane at the middle of proof mass thickness along the diagonal line of square poof mass. The highly symmetrical configuration of the sensor can eliminate the main disadvantage of SOQ method, which is verified by experiment.