• The stage is driven by three piezoelectric actuators (PEAs) and guided by a flexible hinge based mechanism with three symmetric T-shape hinges.
• The T-shape flexure hinge is composed of three leaf-spring hinge subsections connected at the together like a T-joint.
• Thus, the T-shape flexure hinge can provide the in plane motion with relatively large out-of-plane stiffness.
• It is demonstrated from the computational analyses that the proposed T-shape flexure hinge can provide high natural frequency, large working range and high motion dexterity.
• The experiments results showed that the stage can provide for good performance.
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