Nanostructured TiN-based thin films by a novel and facile synthetic route

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• 作者：Jianyun Zheng^a ; ^b ; ^{wetrainzjy@163.com} ; Yanhong Lv^c ; Shusheng Xu^a ; Xi Han^a ; ^d ; Shuaituo Zhang^a ; Junying Hao^a ; ^{jyhao@licp.cas.cn} ; Weimin Liu^a
• 关键词：Nanostructured thin films ; TiN-based ; High specific area ; Transparent and hydrophobic ; Flexible and superhard
• 刊名：Materials & Design
• 出版年：2017
• 出版时间：5 January 2017
• 年：2017
• 卷：113
• 期：Complete
• 页码：142-148
• 全文大小：1333 K
• 卷排序：113

文摘

Nanostructured TiN-based thin films were prepared by a two-step synthetic route. The films with pillars and nets (or cirri) were hydrophobic and hydrophilic, respectively. The film with 3D network structure had a large surface area (768.2 m2·g− 1). A hybrid film containing nanostructured TiN successfully integrated superhard, flexible and lubricant effects.