Annealing effect on physical properties of evaporated molybdenum oxide thin films for ethanol sensing

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• 作者：S. Touihri^a ; ^{s_touihri@yahoo.fr} ; A. Arfaoui^a ; Y. Tarchouna^a ; A. Labidi^b ; M. Amlouk^a ; J.C. Bernede^c
• 关键词：Molybdenum oxide ; Thermal evaporation ; Annealing ; Crystalline structure ; Optical properties and gas sensor
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：394
• 期：Complete
• 页码：414-424
• 全文大小：3019 K
• 卷排序：394

文摘

Thermally grown molybdenum oxide films are amorphous, oxygen deficient and gas sensing. Air or vacuum annealing transforms them into a sub-stoichiometric MoO3−x phase. The samples annealed at 500 °C in oxygen were crystallized and identified as pure orthorhombic MoO3 phase. The conduction process and sensing mechanism of MoO3-x to ethanol have been studied.