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Combined Ligand Exchange and Substitution Reactions in Atomic Layer Deposition of Conformal Ge2Sb2Te5 Film for Phase Change Memory Application
详细信息
查看全文
作者:
Taeyong Eom
;
Taehong Gwon
;
Sijung Yoo
;
Byung Joon Choi
;
Moo-Sung Kim
;
Iain
Buchanan
;
Sergei Ivanov
;
Manchao Xiao
;
Cheol Seong Hwang
刊名:Chemistry of Materials
出版年:2015
出版时间:May 26, 2015
年:2015
卷:27
期:10
页码:3707-3713
全文大小:382K
ISSN:1520-5002
文摘
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