Chemical Vapor Deposition of Large-Size Monolayer MoSe2 Crystals on Molten Glass

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• 作者：Jianyi ChenXiaoxu Zhao ; Sherman J. R. Tan ; Hai Xu ; Bo Wu ; Bo Liu ; Deyi Fu ; Wei Fu ; Dechao Geng ; Yanpeng Liu ; Wei Liu ; Wei Tang ; Linjun Li ; Wu Zhou ; Tze Chien Sum ; Kian Ping Loh
• 刊名：Journal of the American Chemical Society
• 出版年：2017
• 出版时间：January 25, 2017
• 年：2017
• 卷：139
• 期：3
• 页码：1073-1076
• 全文大小：362K
• ISSN：1520-5126

文摘

We report the fast growth of high-quality millimeter-size monolayer MoSe₂ crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe₂ crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm²/(V·s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS₂ crystals. Our results demonstrate that “liquid-state” glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).