Chemically Homogeneous and Thermally Robust Ni1–xPtxSi Film Formed Under a Non-Equilibrium Melting/Quenching Condition
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文摘
To synthesize a thermally robust Ni<sub>1–xsub>Pt<sub>xsub>Si film suitable for ultrashallow junctions in advanced metal-oxide-semiconductor field-effect transistors, we used a continuous laser beam to carry out millisecond annealing (MSA) on a preformed Ni-rich silicide film at a local surface temperature above 1000 °C while heating the substrate to initiate a phase transition. The melting and quenching process by this unique high-temperature MSA process formed a Ni<sub>1–xsub>Pt<sub>xsub>Si film with homogeneous Pt distribution across the entire film thickness. After additional substantial thermal treatment up to 800 °C, the noble Ni<sub>1–xsub>Pt<sub>xsub>Si film maintained a low-resistive phase without agglomeration and even exhibited interface flattening with the underlying Si substrate.
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