Wafer-Scale Nanopatterning and Translation into High-Performance Piezoelectric Nanowires

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• 作者：Thanh D. Nguyen ; John M. Nagarah ; Yi Qi ; Stephen S. Nonnenmann ; Anatoli V. Morozov ; Simonne Li ; Craig B. Arnold ; Michael C. McAlpine
• 刊名：Nano Letters
• 出版年：2010
• 出版时间：November 10, 2010
• 年：2010
• 卷：10
• 期：11
• 页码：4595-4599
• 全文大小：440K
• 年卷期：v.10,no.11(November 10, 2010)
• ISSN：1530-6992

文摘

The development of a facile method for fabricating one-dimensional, precisely positioned nanostructures over large areas offers exciting opportunities in fundamental research and innovative applications. Large-scale nanofabrication methods have been restricted in accessibility due to their complexity and cost. Likewise, bottom-up synthesis of nanowires has been limited in methods to assemble these structures at precisely defined locations. Nanomaterials such as PbZr_xTi_1−xO₃ (PZT) nanowires (NWs)—which may be useful for nonvolatile memory storage (FeRAM), nanoactuation, and nanoscale power generation—are difficult to synthesize without suffering from polycrystallinity or poor stoichiometric control. Here, we report a novel fabrication method which requires only low-resolution photolithography and electrochemical etching to generate ultrasmooth NWs over wafer scales. These nanostructures are subsequently used as patterning templates to generate PZT nanowires with the highest reported piezoelectric performance (d_eff 145 pm/V). The combined large-scale nanopatterning with hierarchical assembly of functional nanomaterials could yield breakthroughs in areas ranging from nanodevice arrays to nanodevice powering.

Keywords:

Nanomanufacturing; energy conversion; piezoelectric nanowires; laser annealing