Hole Array Perfect Absorbers for Spectrally Selective Midwavelength Infrared Pyroelectric Detectors

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• 作者：Thang Duy Dao ; Satoshi Ishii ; Takahiro Yokoyama ; Tomomi Sawada ; Ramu Pasupathi Sugavaneshwar ; Kai Chen ; Yoshiki Wada ; Toshihide Nabatame ; Tadaaki Nagao
• 刊名：ACS Photonics
• 出版年：2016
• 出版时间：July 20, 2016
• 年：2016
• 卷：3
• 期：7
• 页码：1271-1278
• 全文大小：638K
• 年卷期：0
• ISSN：2330-4022

文摘

We demonstrate a hybrid plasmonic–pyroelectric device operating as an uncooled midwavelength infrared detector with narrowband spectral selectivity. The device consists of a plasmonic perfect absorber with a built-in pyroelectric ZnO layer: It consists of a ZnO layer sandwiched by a Au microhole array as a top electrode and a Pt bottom electrode as a template for the uniaxially grown ZnO film. The geometrical design of the plasmonic Au (hole array)/ZnO/Pt system is determined by the numerical electromagnetic simulation and then fabricated by colloidal-mask lithography combined with reactive-ion etching. The fabricated detectors exhibit excellent spectral selectivity at the predesigned plasmonic resonances, which are tunable by changing the Au hole diameters. The results obtained here open up a route for realizing a new type of uncooled spectroscopic infrared detectors with a compact design and simple fabrication process.