Microscale Fracture Behavior of Single Crystal Silicon Beams at Elevated Temperatures

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• 作者：Balila Nagamani Jaya ; Jeffrey M. Wheeler ; Juri Wehrs ; James P. Best ; Rafael Soler ; Johann Michler ; Christoph Kirchlechner ; Gerhard Dehm
• 刊名：Nano Letters
• 出版年：2016
• 出版时间：December 14, 2016
• 年：2016
• 卷：16
• 期：12
• 页码：7597-7603
• 全文大小：369K
• ISSN：1530-6992

文摘

The micromechanical fracture behavior of Si [100] was investigated as a function of temperature in the scanning electron microscope with a nanoindenter. A gradual increase in K_C was observed with temperature, in contrast to sharp transitions reported earlier for macro-Si. A transition in cracking mechanism via crack branching occurs at ∼300 °C accompanied by multiple load drops. This reveals that onset of small-scale plasticity plays an important role in the brittle-to-ductile transition of miniaturized Si.