Evidence of Proton Transport in Atomic Layer Deposited Yttria-Stabilized Zirconia Films

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• 作者：Joong Sun Park ; Young Beom Kim ; Joon Hyung Shim ; Sangkyun Kang ; Turgut M. Gr ; Fritz B. Prinz
• 刊名：Chemistry of Materials
• 出版年：2010
• 出版时间：September 28, 2010
• 年：2010
• 卷：22
• 期：18
• 页码：5366-5370
• 全文大小：727K
• 年卷期：v.22,no.18(September 28, 2010)
• ISSN：1520-5002

文摘

This study presents spectroscopic and electrochemical evidence that verifies proton transport in the temperature regime 300−450 °C in yttria-stabilized zirconia (YSZ) thin film membranes fabricated by atomic layer deposition (ALD). High-resolution X-ray photoelectron spectrometry (XPS) of O1s showed that the OH peak was significantly more pronounced in ALD samples than in single-crystal YSZ. Similarly, secondary ion mass spectrometry (SIMS) measurements, conducted for comparison on single-crystalline YSZ and atomic layer deposited YSZ, indicated that ALD YSZ contains 100 times higher deuterium concentration than single crystalline YSZ. SIMS depth profiles suggested diffusion of protons through protonic defects in YSZ. We have also fabricated fuel cells employing ALD YSZ with dense palladium layers to block oxygen but allow hydrogen transport. These performed as protonic fuel cells at intermediate temperatures achieving 10 mW/cm² at 450 °C. These results open the possibility to engineer ALD YSZ as electrolyte membranes for new protonic devices operating at relatively low temperature regimes.