High-Efficiency Ordered Silicon Nano-Conical-Frustum Array Solar Cells by Self-Powered Parallel Electron Lithography

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• 作者：Yuerui Lu ; Amit Lal
• 刊名：Nano Letters
• 出版年：2010
• 出版时间：November 10, 2010
• 年：2010
• 卷：10
• 期：11
• 页码：4651-4656
• 全文大小：451K
• 年卷期：v.10,no.11(November 10, 2010)
• ISSN：1530-6992

文摘

Nanostructured silicon thin film solar cells are promising, due to the strongly enhanced light trapping, high carrier collection efficiency, and potential low cost. Ordered nanostructure arrays, with large-area controllable spacing, orientation, and size, are critical for reliable light-trapping and high-efficiency solar cells. Available top-down lithography approaches to fabricate large-area ordered nanostructure arrays are challenging due to the requirement of both high lithography resolution and high throughput. Here, a novel ordered silicon nano-conical-frustum array structure, exhibiting an impressive absorbance of 99% (upper bound) over wavelengths 400−1100 nm by a thickness of only 5 μm, is realized by our recently reported technique self-powered parallel electron lithography that has high-throughput and sub-35-nm high resolution. Moreover, high-efficiency (up to 10.8%) solar cells are demonstrated, using these ordered ultrathin silicon nano-conical-frustum arrays. These related fabrication techniques can also be transferred to low-cost substrate solar energy harvesting device applications.

Keywords:

Solar cell; photonic crystal; nanocone; parallel lithography; light trapping