Fabrication and Numerical Characterization of Infrared Metamaterial Absorbers for Refractometric Biosensors

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• 作者：Khai Q. Le ; Jing Bai ; Quang Minh Ngo ; Pai-Yen Chen
• 关键词：Infrared absorber ; metamaterial ; label ; free biosensor
• 刊名：Journal of Electronic Materials
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：46
• 期：1
• 页码：668-676
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Optical and Electronic Materials; Characterization and Evaluation of Materials; Electronics and Microelectronics, Instrumentation; Solid State Physics;
• 出版者：Springer US
• ISSN：1543-186X
• 卷排序：46

文摘

We report the successful fabrication of infrared plasmonic metamaterial absorbers by electron beam lithography and the lift-off technique. The absorber consists of periodic arrays of gold (Au) nanostructures deposited on a stack of thin silica spacer and gold film (acting as a mirror) on a silicon wafer. At resonance, we numerically observed a strong field enhancement between the metallic nanostructures and the Au film, resulting in a strong confinement of incident light within the silica spacer and thus a high absorption of up to 80% at infrared wavelengths. Our experimental measurement for reflection coefficients are in excellent agreement with the full-wave simulation results. We show that the resonant absorption spectral response can be used for highly-sensitive, label-free refractive-index biosensors. By tailoring various forms of nanostructures, we investigate their refractive index sensitivities to identity the most sensitive sensor at specific infrared wavelengths.