Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression

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• 作者：N K VARSHNAY ; A SINGH ; N S BENERJI
• 关键词：XeCl excimer laser ; magnetic pulse compressor ; saturable inductor ; micro ; machining
• 刊名：Pramana
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：88
• 期：2
• 全文大小：
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics, general; Astronomy, Observations and Techniques; Astrophysics and Astroparticles;
• 出版者：Springer India
• ISSN：0973-7111
• 卷排序：88

文摘

Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression suitable for material processing applications are presented here. The laser incorporates in-built compact gas circulation and gas cooling to ensure fresh gas mixture between the electrodes for repetitive operation. A magnetically coupled tangential blower is used for gas circulation inside the laser chamber for repetitive operation. The exciter consists of C–C energy transfer circuit and thyratron is used as a high-voltage main switch with single-stage magnetic pulse compression (MPC) between thyratron and the laser electrodes. Low inductance of the laser head and uniform and intense pre-ionization are the main features of the electric circuit used in the laser. A 250 ns rise time voltage pulse was compressed to 100 ns duration with a single-stage magnetic pulse compressor using Ni–Zn ferrite cores. The laser can generate about 150 mJ at ∼100 Hz rep-rate reliably from a discharge volume of 100 cm 3. 2D spatial laser beam profile generated is presented here. The profile shows that the laser beam is completely filled with flat-top which is suitable for material processing applications. The SEM image of the microhole generated on copper target is presented here.