Plasma chemistry induced by low energy electron beams

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• 作者：Andreas Himpsl (1)
  Thomas Dandl (1)
  Thomas Heindl (1)
  Alexander Neumeier (2)
  Jochen Wieser (3)
  Andreas Ulrich (1)
  
  1. Physik-Department E12 ; Technische Universit盲t M眉nchen ; James-Franck-Str. 1 ; 85748 ; Garching ; Germany
  2. Physik-Department E15 ; Technische Universit盲t M眉nchen ; James-Franck-Str. 1 ; 85748 ; Garching ; Germany
  3. Excitech GmbH ; Branterei 33 ; 26419 ; Schortens ; Germany
  
• 关键词：Plasma Physics
• 刊名：The European Physical Journal D - Atomic, Molecular and Optical Physics
• 出版年：2014
• 出版时间：June 2014
• 年：2014
• 卷：68
• 期：6
• 全文大小：1,346 KB
• 参考文献：1. Kummler, R., Leffert, C., Im, K., Piccirelli, R., Kevan, L., Willis, C. (1977) J. Phys. Chem. 81: pp. 2451 CrossRef
  2. Locht, R., Davister, M. (1995) Int. J. Mass Spectrom. Ion Processes 144: pp. 105 CrossRef
  3. Ulrich, A., Heindl, T., Kr眉cken, R., Morozov, A., Skrobol, C., Wieser, J. (2009) Eur. Phys. J. Appl. Phys. 47: pp. 22815 CrossRef
  4. Morozov, A., Heindl, T., Skrobol, C., Wieser, J., Kr眉cken, R., Ulrich, A. (2008) Eur. Phys. J. D 48: pp. 383 CrossRef
  5. Morozov, A., Kr眉cken, R., Ulrich, A., Wieser, J. (2006) J. Appl. Phys. 100: pp. 093305 CrossRef
  6. Dandl, T., Heindl, T., Ulrich, A. (2012) J. Instrum. 7: pp. P11005 CrossRef
  7. Morozov, A., Kr眉cken, R., Wieser, J., Ulrich, A. (2005) Eur. Phys. J. D 33: pp. 207 CrossRef
  8. Wieser, J., Murnick, D.E., Ulrich, A., Huggins, H.A., Liddle, A., Brown, W.L. (1997) Rev. Sci. Instrum. 68: pp. 1360 CrossRef
  9. M眉hlberger, F., Wieser, J., Morozov, A., Ulrich, A., Zimmermann, R. (2005) Anal. Chem. 77: pp. 2218 CrossRef
  10. Gunzer, F., Ulrich, A., Baether, W. (2010) Int. J. Ion Mobil. Spectrom. 13: pp. 9 CrossRef
  11. Skrobol, C., Heindl, T., Kr眉cken, R., Morozov, A., Steinh眉bl, R., Wieser, J., Ulrich, A. (2009) Eur. Phys. J. D 54: pp. 103 CrossRef
  12. A. Ulrich, T. Heindl, T. Dandl, R. Kr眉cken, J. Wieser, in / Proceedings of the 12th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XII), Tren猫ianske Teplice, Slovakia, Sept. 12鈥?7, 2010, Vol. 2, p. 556
  13. Morozov, A., Kr眉cken, R., Ulrich, A., Wieser, J. (2006) J. Appl. Phys. 100: pp. 093305 CrossRef
  14. Hovington, P., Drouin, D., Gauvin, R. (1997) Scanning 19: pp. 1 CrossRef
  15. Efthimiopoulos, T., Zouridis, D., Ulrich, A. (1997) J. Phys. D 30: pp. 1748 CrossRef
  16. Ung, A.-Y., Schiff, H.I. (1966) Can. J. Chem. 44: pp. 1981 CrossRef
  17. / CRC Handbook of Chemistry and Physics, 55th edn. (CRC Press Inc., Cleveland, 1974/1975), Sect. F204 ff
  18. Wieser, J., Murnick, D.E., Ulrich, A., Huggins, H.A., Liddle, A., Brown, W.L. (1997) Rev. Sci. Instrum. 68: pp. 1360 CrossRef
  19. Wieser, J., Salvermoser, M., Shaw, L.H., Ulrich, A., Murnick, D.E., Dahi, H. (1998) J. Phys. B 31: pp. 4589 CrossRef
  20. Smyth, H.D. (1931) Phys. Rev. 38: pp. 2000 CrossRef
  
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Atoms, Molecules, Clusters and Plasmas
  Nanotechnology
  Quantum Physics
  Quantum Computing, Information and Physics
  Complexity
  Solid State Physics and Spectroscopy
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1434-6079

文摘

A table top setup for studying plasma chemical reactions is described. Low energy (15 keV) electrons are used to induce the chemical reactions. The experiments are performed with pure gases and gas mixtures at atmospheric pressure. The radiolysis of CO2 is studied as an example and a G-value of 3 was achieved for a gas flow of 14 ml/min. The experiments were performed with a total beam power of 450 mW sent into a gas cell with a volume of 40 mm3. Mass spectrometry and a spectroscopic study were used for diagnostics. A catalytic effect of xenon for the splitting of CO2 molecules was observed and supported by comparative measurements with Ar-CO2 and Ar-Xe-CO2 mixtures. The power deposition profiles in the target cell are discussed on the basis of a numerical model.