Design and simulation of a novel bridge-like coplanar waveguide for microelectromechanical systems

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• 作者：Xiaofeng Sun ; Guifu Ding ; Hong Wang ; Zhenxin Jiang ; Binhong Li and Minyi Shen
• 刊名：Microsystem Technologies
• 出版年：2008
• 出版时间：January, 2008
• 年：2008
• 卷：14
• 期：1
• 页码：95-98
• 全文大小：276 KB
• 刊物类别：Engineering
• 刊物主题：Electronics, Microelectronics and Instrumentation
  Nanotechnology
  Mechanical Engineering
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-1858

文摘

In this paper, a kind of novel bridge-like coplanar waveguide has been designed and simulated at 10 GHz. Compared with conventional CPW, this design has lower attenuation and wider available characteristic impedance range. In addition, this design can avoid the interference among the adjacent components of RF MEMS devices.