Study on Mechanical Grinding of Large Area Free-standing Diamond Film

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• 作者：Wen Xing-kaiWei Jun-junLiu Jin-longCHen Liang-xianHei Li-fuLi Cheng-ming
• 会议时间：2013-11-13
• 关键词：large area free-standing diamond film ; mechanical grinding ; stress-induced ; local graphitization
• 作者单位：Institute of Advanced Materials and Technology, University of Science and Technology Beijing
• 母体文献：第六届郑州国际超硬材料及制品研讨会暨庆祝中国人造金刚石诞生50周年大会论文集
• 会议名称：第六届郑州国际超硬材料及制品研讨会暨庆祝中国人造金刚石诞生50周年大会
• 会议地点：郑州
• 主办单位：中国机床工具工业协会
• 语种：chi

摘要

Mechanical grinding was applied to fiat the free-standing diamond film deposited by 100 kW high power DC Arc Plasma Jet CVD system.The influences of grinding speed and pressure on the surface morphology, diamond removal rate and diamond removal mechanism were studied by scanning electron microscopy, digimatic micrometer and X-ray photoelectron spectroscopy, respectively.The results showed that speed and pressure had significant effects on the surface morphology and diamond removal rate.While the grinding speed and pressure were 40 r/min and 0.50 MPa respectively, the diamond removal rate could reach 80.5 μm/h.No iron atoms were detected on the surface of the grinded diamond film.The speculated diamond removal mechanism was mainly the combination of micro-cleavage and stress-induced local graphitization.