摘要
多学科交叉研究是推动科技进步的重要手段。将光学与材料学相结合,改善材料加工工艺,可节约生产成本,获得较大经济效益。利用激光作为能量来源,对金属或非金属材料表面进行清洗,可显著提升清洗质量。基于激光清洗技术具有效率高、成本低、无污染、无损伤和范围广等研究优势,回顾了激光清洗技术的发展历程。从原理上分析了激光清洗的工艺特点,将激光清洗技术分为干式激光清洗、湿式激光清洗和激光等离子体冲击波清洗等3类。总结了激光清洗技术在材料加工、军用装备、文物保护、微电子加工技术和医疗等领域的应用现状,并对激光清洗技术的发展前景进行了展望。
Interdisciplinary research was an important means to promote scientific and technological progress.Combining optics with material science and improving material processing technology can save production cost and obtain economic benefits.Adoption of laser in cleaning the surface of metal or non-metal materials can significantly improve the cleaning quality,and it had advantages of high efficiency,low cost,no pollution,no damage and wide range and so on.The history and the current status of laser cleaning technology were reviewed.The process of laser cleaning was analyzed theoretically.Three types of laser cleaning techniques,including dry laser cleaning,wet laser cleaning and laser plasma blast cleaning,were introduced.The application of laser cleaning technology in material processing,military equipment,historic preservation,microelectronic machining technology and medical treatment was summarized.The development prospect of laser cleaning technology was also prospected.
引文
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