摘要
本文研究了Ag/Cu纳米多层膜和Ag/Nb纳米多层膜室温下及退火状态下的界面结构。通过X射线衍射分析以及透射电镜对形貌进行了表征。结果表明,调制周期为20nm时,Ag/Cu多层膜界面为半共格结构,Ag/Nb多层膜界面为共格结构。经200℃～500℃退火处理后,Ag/Cu多层膜在400℃时层状结构破坏,而Ag/Nb多层膜在500℃下仍保持很好的结构稳定性。研究结果说明,共格界面比半共格界面具有更高的热稳定性。
The interfacial structures of Ag/Cu nano-multilayers and Ag/Nb nano-multilayers at room temperature and annealed state were studied. The morphology was characterized by X-ray diffraction and transmission electron microscopy.The results show that the interface of Ag/Cu multilayers is semi-coherent and that of Ag/Nb multilayers is coherent when the modulation period is 20 nm. After annealing at 200℃ ～500℃, the Ag/Cu multilayers were destroyed at 400℃, while the Ag/Nb multilayers remained stable at 500 C. The results show that the coherent interface has higher thermal stability than the semi-coherent interface.
引文
[1]M. Hu, X. Gao, L. Weng, J. Sun, W. C. Liu, Appl Surf Sci,313(2014)563-568.
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