Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si_3N_4–VO_2–Si_3N_4 sandwich

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英文篇名：Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si_3N_4–VO_2–Si_3N_4 sandwich 作者：赵帅 ; 胡放荣 ; 徐新龙 ; 江明珠 ; 张文涛 ; 银珊 ; 姜文英 英文作者：Shuai Zhao;Fangrong Hu;Xinlong Xu;Mingzhu Jiang;Wentao Zhang;Shan Yin;Wenying Jiang;Guangxi Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology;Nanobiophotonic Center, State Key Laboratory Incubation Base of Photoelectric Technology and Functional Materials, and Institute of Photonics &Photon-Technology, Northwest University; 英文关键词：tunable band-pass filter;;hybrid metamaterials;;terahertz;;vanadium dioxide(VO_2) 中文刊名：ZGWL 英文刊名：中国物理B 机构：Guangxi Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology;Nanobiophotonic Center, State Key Laboratory Incubation Base of Photoelectric Technology and Functional Materials, and Institute of Photonics &Photon-Technology, Northwest University; 出版日期：2019-05-15 出版单位：Chinese Physics B 年：2019 期：v.28 基金：Project supported by the National Natural Science Foundation of China(Grant Nos.11574059,61565004,and 11774288);; the National Technology Major Special Project,China(Grant No.2017ZX02101007-003);; the Natural Science Foundation of Guangxi,China(Grant Nos.2015GXNSFDA139039 and2017GXNSFBA198116);; the Foundation from Guangxi Key Laboratory of Automatic Detection Technology and Instrument,China(Grant No.YQ16101);; the Innovation of Guangxi Graduate Education,China(Grant Nos.2018YJCX70,2018YJCX67,and 2018YJCX74) 语种：英文; 页：ZGWL201905019 页数：6 CN：05 ISSN：11-5639/O4 分类号：115-120

摘要

We experimentally demonstrate an electrically triggered terahertz(THz) dual-band tunable band-pass filter based on Si_3 N_4–VO_2–Si_3 N_4 sandwich-structured hybrid metamaterials. The insulator–metal phase transition of VO_2 film is induced by the Joule thermal effect of the top metal layer. The finite-integration-time-domain(FITD) method and finite element method(FEM) are used for numerical simulations. The sample is fabricated using a surface micromachining process,and characterized by a THz time-domain-spectrometer(TDS). When the bias current is 0.225 A, the intensity modulation depths at two central frequencies of 0.56 THz and 0.91 THz are about 81.7% and 81.3%, respectively. This novel design can achieve dynamically electric–thermo–optic modulation in the THz region, and has potential applications in the fields of THz communications, imaging, sensing, and astronomy exploration.
        We experimentally demonstrate an electrically triggered terahertz(THz) dual-band tunable band-pass filter based on Si_3 N_4–VO_2–Si_3 N_4 sandwich-structured hybrid metamaterials. The insulator–metal phase transition of VO_2 film is induced by the Joule thermal effect of the top metal layer. The finite-integration-time-domain(FITD) method and finite element method(FEM) are used for numerical simulations. The sample is fabricated using a surface micromachining process,and characterized by a THz time-domain-spectrometer(TDS). When the bias current is 0.225 A, the intensity modulation depths at two central frequencies of 0.56 THz and 0.91 THz are about 81.7% and 81.3%, respectively. This novel design can achieve dynamically electric–thermo–optic modulation in the THz region, and has potential applications in the fields of THz communications, imaging, sensing, and astronomy exploration.

引文

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