摘要
自适应光学系统能够实时测量并补偿各种干扰引起的光学系统的波前畸变，使光学系统具有自动适应外界条件变化从而保持最佳工作状态的能力。基于这样的优点，自适应光学一直以来被广泛应用于天文观测和激光传输等领域，获得了极大的认同。而本世纪初随着其它领域对自适应光学的逐渐增长的兴趣，其应用范围开始扩展，包括人眼视网膜成像系统、激光通信系统等。但是整个自适应光学系统中最核心的器件——波前校正器特别是变形反射镜——由于技术复杂、造价昂贵几乎成为限制自适应光学系统应用范围的主要因素。于是各种低成本的替代技术的成为自适应光学发展的新热点，双压电片变形反射镜正是其中之一。开展双压电片变形镜的相关研究工作对促进我国自适应光学技术的发展有着重要的意义。
本论文的研究工作主要包括：在理论分析的指导下，利用有限元方法设计了单层压电材料，镜面圆周紧支撑的双压电片变形镜结构；制定合理的工艺流程制作了20单元的双压电片变形镜样镜并对其进行了详细的性能测试和分析，结果验证了工艺的可行性和分析模型的有效性；研制了两个分别为9单元和35单元的双压电片变形反射镜用于人眼视网膜自适应光学成像系统，分析表明其对前20项Zernike像差的校正效果优于传统的37单元分立式变形反射镜，并且用该系统获得了对视网膜血管和视细胞的清晰成像结果；还利用9单元双压电片变形反射镜开展了用于工业激光加工的低成本自适应光学系统试验，结果表明这套自适应光学系统能够有效改善激光加工设备中飞行光路引入的焦点变化问题并对最终的激光聚焦强度有改善作用。
本文的主要创新点是：
1、制订了合理的研制工艺路线，研制出了能够投入实际使用的双压电片变形镜，为开拓我国的自适应光学的民用市场奠定了基础。
2、采用有限元法和实验测量相结合的方式对双压电片变形镜展开研究，建立了合理的有限元模型，为实际双压电片变形镜的设计优化提供可靠依据和有效手段；验证了双压电片变形镜适合校正低阶像差的特性。
3、证明了双压电片变形镜用于人眼视网膜自适应光学成像系统的适应性和优越性，并使之成为设备小型化并得到性能提升的核心器件；首次为工业激光加工系统设计了低成本的自适应光学系统和校正方案，初步证明了其有效性，为进一步的双压电片变形镜投入实际系统使用奠定了基础。
The Adaptive Optics(AO) can compensate the dynamical interference caused by theoptical wave-front distortion in real-time. With an AO system, the regular optical systemhas the ability to automatically adapt to external conditions to maintain optimumworking performance. At the beginning of this century, many other optical systemsbesides to astronomy are intrested in adaptive optics, including human retinal imagingsystems, laser communication system,etc. But the cost of deformable mirrors(DM)-dueto its technical complexity, become the main obstacle to expand the field of applicationof adaptive optics. So a variety of low-cost alternative technologies become the new hottopic of the adaptive optics. Bimorph deformable mirror is one of them. Research onbimorph deformable mirror is of great significance to the promotion of the developmentof domestic adaptive optical system.
This thesis describes the modeling and manufacture of bimorph deformablemirrors as well as two example of their applications.A general review of adaptive opticsand deformable mirrors is provided, paying particular attention to those technologieswhich would allow adaptive optics to be employed in non-astronomical low-costsituations. Reasonable finite element model of the bimorph deformable mirror wasestablished. The process of manufacturing bimorph deformable mirrors is described insome detail, and results of this peocedure are presented. Design and fabricate a20-element prototype Bimorph DM, and detail test results proved the accuracy of ourFEA model and fabrication process. Based on this, a pair of bimorph deformablemirrors for dual-deformable mirror human retinal imaging system are designed andfabricated. A novel full function adaptive optics system applied to laser cutting systemis proposed, including wavefront-less control algorithm and low cost bimorphdeformable mirror are used. The effectiveness of this system is demonstrated by twosets of closed loop experiments.
The main results of this paper are following:
1, Formulate a reasonable design and fabricate process and the first practicalbimorph deformable mirror in the domestic was manufactured；
2, A combination of FEM analysis and experimental verification of bimorphdeformable mirror are established; The characteristics of bimorph deformable mirrorthat suitable for correction of low-order aberrations are verified;
3, Two different bimorph deformable mirrors for dual-deformable mirror human retinal imaging system are manufactured. Measurement results indicate that they satisfythe requirement and are better for human retinal imaging adaptive optical system thanconventional stack actuator deformable mirror. A novel full function adaptive opticssystem applied to laser cutting system is proposed. The validity of this system isdemonstrated by two sets of closed loop experiments.
引文
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