设为首页
收藏本站
网站地图
|
English
|
公务邮箱
About the library
Background
History
Leadership
Organization
Readers' Guide
Opening Hours
Collections
Help Via Email
Publications
Electronic Information Resources
常用资源
电子图书
期刊论文
学位会议
外文资源
特色专题
内部出版物
SpringerLink电子期刊(4)
Elsevier电子期刊(12)
在“
Elsevier电子期刊
”中,
命中:
12
条,耗时:0.0159922 秒
在所有数据库中总计命中:
16
条
1.
Very large scale
heterogeneous
integration
(VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays
作者:
Fredrik Forsberg
;
Niclas Roxhed
;
Andreas C. Fischer
;
Bj?rn Samel
;
Per Ericsson
;
Nils Hoivik
;
Adriana Lapadatu
;
Martin Bring
;
Gjermund Kittilsl
;
G?ran Stemme
;
Frank Niklaus
关键词:
Very large scale
heterogeneous
integration
;
Thermal imaging
;
MEMS
;
Bolometer
;
IR
刊名:Infrared Physics and Technology
出版年:2013
2.
Characterization
of
bonding interface prepared by room-temperature Si wafer direct bonding using the surface smoothing effect
of
a Ne fast atom beam
作者:
Yuichi Kurashima
;
y-kurashima@aist.go.jp" class="auth_mail
;
Atsuhiko Maeda
;
Hideki Takagi
关键词:
Room-temperature Si wafer direct bonding
;
Heterogeneous
integration
of
MEMS
;
Surface smoothing
;
Ne fast atom beam
刊名:Microelectronic Engineering
出版年:25 April, 2014
3.
Mechanical resistance
of
patterned BCB bonded joints for
MEMS
packaging
作者:
C. Cuminatto
;
M. Braccini
;
G. Schelcher
;
G. Parry
;
F. Parrain
关键词:
Adhesive bonding
;
Benzocyclobutene
;
Adhesion energy
;
Patterning
刊名:Microelectronic Engineering
出版年:2013
4.
Heterogeneous
Integration
of
Autonomous Systems in Package for Wireless Sensor Networks
作者:
Gonzalo Murillo
;
gonzalo.murillo@uab.es
;
Jordi Agusti
;
Miquel Ló
;
pez-Suá
;
rez
;
Gabriel Abadal
关键词:
Energy harvesting
;
Energy scavenging
;
EHiP
;
Energy Harvester-in-Package
;
CMOS
Integration
;
CMOS-
MEMS
刊名:Procedia Engineering
出版年:2011
5.
Multifunctional optical
MEMS
sensor platform with
heterogeneous
fiber optic Fabry-P¨¦rot sensors for wireless sensor networks
作者:
C. Pang
a
Author Vitae
;
M. Yu
a
;
mmyu@umd.edu
Author Vitae
;
X.M. Zhang
b
Author Vitae
;
A.K. Gupta
a
Author Vitae
;
K.M. Bryden
c
Author Vitae
关键词:
Optical
integration
;
Wireless sensor network
;
Optical sensors
;
Low coherence interferometry
刊名:Sensors and Actuators A: Physical
出版年:2012
6.
Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication
of
silicon-on-integrated-circuit (SOIC) wafers in 3D
integration
of
MEMS
and ICs
作者:
Frank Niklaus
;
Adit Decharat
;
Fredrik Forsberg
;
Niclas Roxhed
;
Martin Lapisa
;
Michael Populin
;
Fabian Zimmer
;
Jö
;
rn Lemm
;
Gö
;
ran Stemme
关键词:
Adhesive wafer bonding
;
Nano-imprint resist
;
Polymer
;
3D IC
MEMS
integration
;
Silicon-on-integrated-circuit
;
SOIC
刊名:Sensors and Actuators A: Physical
出版年:2009
7.
Measurement
of
reaction heats using a polysilicon-based microcalorimetric sensor
作者:
E. Vereshchagina
a
;
c
;
e.vereshchagina@utwente.nl" rel="n
of
ollow
;
R.A.M. Wolters
b
;
c
;
d
;
J.G.E. Gardeniers
a
;
c
[Author vitae]
关键词:
Microcalorimeter
;
Hot-plate
;
Gas sensor
;
Oxidation
of
alkanes
;
Catalyst
刊名:Sensors and Actuators A: Physical
出版年:2011
8.
Modelling, simulation and design constraints
of
electrostatic self-assembly
of
microparts
作者:
P.
;
Lazarou
a
;
;
plazarou@freemail.gr
;
;
lazarou@mech.upatras.gr
;
N.
;
Aspragathos
a
;
J.
;
Wilde
b
关键词:
Electrostatic self-assembly
;
Modelling
;
Simulation
;
Design constraints
;
MEMS
刊名:CIRP Journal
of
Manufacturing Science and Technology
出版年:2011
9.
Measurement
of
reaction heats using a polysilicon-based microcalorimetric sensor
作者:
E. Vereshchagina
a
;
c
;
e.vereshchagina@utwente.nl"" rel=""n
of
ollow
;
R.A.M. Wolters
b
;
c
;
d
;
J.G.E. Gardeniers
a
;
c
[Author vitae]
关键词:
Microcalorimeter
;
Hot-plate
;
Gas sensor
;
Oxidation
of
alkanes
;
Catalyst
刊名:Sensors and Actuators A: Physical
出版年:2011
10.
Controlled liquid-solid interactions at the micron-scale: towards self-assembling
MEMS
作者:
Karl F. Bö
;
hringer
关键词:
self-assembly
;
interfacial engineering
;
programmable surface
;
hetero system
integration
;
packaging
刊名:Procedia Chemistry
出版年:2009
1
2
按检索点细分(12)
关键词(2)
文摘(6)
按出版年细分(12)
2027年及以后(1)
2013年(2)
2012年(1)
2011年(4)
2009年(2)
2008年(1)
2006年(1)
NGLC 2004-2010.National Geological Library of China All Rights Reserved.
Add:29 Xueyuan Rd,Haidian District,Beijing,PRC. Mail Add: 8324 mailbox 100083
For exchange or info please contact us via
email
.