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内部出版物
SpringerLink电子期刊(29)
Elsevier电子期刊(4)
在“
Elsevier电子期刊
”中,
命中:
4
条,耗时:小于0.01 秒
在所有数据库中总计命中:
33
条
1.
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
作者:
Steven Steen
;
Sharee
J
. McNab
;
Lidi
j
a
Sekaric
;
Inna Babich
;
J
yotica Patel
;
J
im Bucchignano
;
Michael Rooks
;
David M. Fried
;
Anna W. Topol
;
J
im R. Brancaccio
et al.
关键词:
Hybrid lithography
;
Electron-beam
;
DUV
;
SRAM
;
FEOL
;
BEOL
;
Device integration
刊名:Microelectronic Engineering
出版年:2006
2.
Studies for a photon collider at the ILC
作者:
F. Bechtel
;
G. Klä
;
mke
;
G. Klemz
;
K. Mö
;
nig
;
H. Nieto
;
H. Nowak
;
A. Rosca
;
J
.
Sekaric
and A. Stahl
关键词:
Photon collider
;
Linear collider
刊名:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
出版年:2006
3.
Loss due to transverse thermoelastic currents in microscale resonators
作者:
Houston
;
B.H.
;
Photiadis
;
D.M.
;
Vignola
;
J
.F.
;
Marcus
;
M.H.
;
Liu
;
Xiao
;
Czaplewski
;
D.
;
Sekaric
;
L.
;
et. al.
关键词:
Microelectromechanical system
;
Nanoelectromechanical system
;
Quality factor
;
Mechanical oscillator
刊名:Materials Science and Engineering: A
出版年:2004
4.
Nanomechanical resonant structures in silicon nitride: fabrication, operation and dissipation issues
作者:
Sekaric
;
L.
;
Carr
;
D.W.
;
Evoy
;
S.
;
Parpia
;
J
.M.
;
Craighead
;
H.G.
关键词:
Nanomechanics
;
Silicon nitride
;
Mechanical quality factor
;
Dissipation
刊名:Sensors and Actuators A: Physical
出版年:2002
1
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