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在“
Elsevier电子期刊
”中,
命中:
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1.
Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS Process
作者:
Adel Merdassi
a
;
adel.merdassi@mail.mcgill.ca"
class
="auth_mail"
title
="E-mail the
corresponding
author
Author
Vitae
;
Mohamed Nizar Kezzo
a
;
mohamad.kezzo@mail.mcgill.ca"
class
="auth_mail"
title
="E-mail the
corresponding
author
Author
Vitae
;
George Xereas
a
;
george.xereas@mail.mcgill.ca"
class
="auth_mail"
title
="E-mail the
corresponding
author
Author
Vitae
;
Vamsy P. Cho
davarapu
b
;
vcho
davarapu
1@u
dayton
.edu"
class
="auth_mail"
title
="E-mail the
corresponding
author
Author
Vitae
关键词:
Multi-axis MEMS accelerometer
;
Tri-axial capacitive accelerometer
;
Low cross-axis sensitivity
;
Decoupled frames
;
Wafer level vacuum encapsulation
;
3-Axis inertial sensor
刊名:Sensors and Actuators A: Physical
出版年:2015
1
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2015年(1)
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