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在“Elsevier电子期刊”中，命中：152条，耗时：小于0.01 秒

在所有数据库中总计命中：1,698条

1.Investigation of the barrier slurry with better defect performance and facilitating post-CMP cleaning

作者：Xiaodong Luan^a ; ^b ; ^{luanyz1988@126.com} ; Yuling Liu^a ; ^b ; Baoguo Zhang^a ; Shengli Wang^a ; Xinhuan Niu^a ; Chenwei Wang^a ; Juan Wang^a

关键词：Chemical mechanical planarization ; Barrier slurry ; Particle size ; Defect free ; Scratch ; Galvanic corrosion

刊名：Microelectronic Engineering

出版年：2017

2.Removal rate and surface quality of the GLSI silicon substrate during the CMP process

作者：Jiao Hong ; ^{hongjiao072095@163.com} ; Xinhuan Niu ; ^{xhniu@hebut.edu.cn} ; Yuling Liu ; Chenwei Wang ; Baoguo Zhang ; Ming Sun ; Juan Wang ; Liying Han ; Wenqian Zhang

关键词：Silicon substrate CMP ; Alkaline slurry ; Silicon removal rate ; Surface roughness ; Haze

刊名：Microelectronic Engineering

出版年：2017

3.Polyacrylic acid, a highly efficient dispersant for aqueous processing of tantalum carbide

作者：Jie Yin^a ; ^{jieyin@mail.sic.ac.cn} ; ^{yinjie19860810@gmail.com} ; Xuejian Liu^a ; Jian Chen^a ; Sea-Hoon Lee^b ; Zhengren Huang^a ; ^{zhrhuang@mail.sic.ac.cn}

关键词：TaC ; PAA ; Dispersion ; Surface properties ; Microstructural homogeneity

刊名：Ceramics International

出版年：2017

4.High-porosity geopolymer membrane supports by peroxide route with the addition of egg white as surfactant

作者：Chengying Bai^a ; ^{chengyingbai@163.com} ; Paolo Colombo^a ; ^b

关键词：Geopolymer foams ; Protein ; Membrane supports ; Peroxide ; Metakaolin

刊名：Ceramics International

出版年：2017

5.A study on exploring the alkaline copper CMP slurry without inhibitors to achieve high planarization efficiency

作者：Xiaodong Luan ; ^{luanyz1988@126.com" class="auth_mail" title="E-mail the corresponding author} ; Yuling Liu ; Chenwei Wang ; Xinhuan Niu ; Juan Wang ; Wenqian Zhang

关键词：Planarization efficiency ; Chemical mechanical planarization (CMP) ; FA/O chelating agent ; Inhibitors ; Chemical activation energy

刊名：Microelectronic Engineering

出版年：2016

6.Effects of KIO₄ concentration and pH values of the solution relevant for chemical mechanical polishing of ruthenium

作者：Jie Cheng ; Tongqing Wang ; Jie Wang ; Yuhong Liu ; ^{liuyuhong@tsinghua.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Xinchun Lu ; ^{xclu@tsinghua.edu.cn" class="auth_mail" title="E-mail the corresponding author}

关键词：Ruthenium ; Chemical mechanical polishing (CMP) ; Potassium periodate (KIO4) ; Corrosion ; Electrochemistry

刊名：Microelectronic Engineering

出版年：2016

7.Feasibility of alumina and alumina-silica nanoparticles to fabricate strengthened betatricalcium phosphate scaffold with improved biological responses

作者：Saeed Hesaraki ; ^{S-hesaraki@merc.ac.ir" class="auth_mail" title="E-mail the corresponding author}

关键词：Tricalcium phosphate ; Scaffold ; Nano-alumina ; Nano-silica ; Mechanical strength

刊名：Ceramics International

出版年：2016

8.Waste cleaning waste: Ammonia abatement in bio-waste anaerobic digestion by soluble substances isolated from bio-waste compost

作者：Matteo Francavilla^a ; ^{matteo.francavilla@unifg.it" class="auth_mail" title="E-mail the corresponding author} ; Luciano Beneduce^a ; ^{lucaino.beneduce@unifg.it" class="auth_mail" title="E-mail the corresponding author} ; Giuseppe Gatta^a ; ^{giuseppe.gatta@unifg.it" class="auth_mail" title="E-mail the corresponding author} ; Enzo Montoneri^a ; ^{enzo.montoneri@gmail.com" class="auth_mail" title="E-mail the corresponding author} ; Massimo Monteleone^a ; ^{massimo.monteleone@unifg.it" class="auth_mail" title="E-mail the corresponding author} ; Davide Mainero^b ; ^{davide.mainero@aceapinerolese.it" class="auth_mail" title="E-mail the corresponding author}

关键词：SBO ; soluble biobased substances obtained from municipal bio-wastes ; CV ; soluble substances obtained from public and private gardening all vegetable wastes

刊名：Biochemical Engineering Journal

出版年：2016

9.Influence of acidic and alkaline silica sols on the performance of Cu/Zn/Al slurry catalysts

作者：Kai SUN^a ; Xiao-yu ZHANG^a ; Lin ZHANG^a ; Zhong-kai BIAN^a ; Wei HUANG^a ; ^{huangwei@tyut.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Zhi-huan ZHAO^b ; ^{zhaozhihuan@tyut.edu.cn" class="auth_mail" title="E-mail the corresponding author}

关键词：complete liquid-phase technology ; acidity ; alkalinity ; silica sol ; dimethyl ether ; Cu/Zn/Al catalyst

刊名：Journal of Fuel Chemistry and Technology

出版年：2015

10.Pilot-scale investigation on slurrying, combustion, and slagging characteristics of coal slurry fuel prepared using industrial wasteliquid

作者：Liu Jianzhong ; Wang Ruikun ; Xi Jianfei ; Zhou Junhu ; Cen Kefa

关键词：Industrial wasteliquid ; Waste disposal ; Coal slurry ; Combustion ; Slagging

刊名：Applied Energy

出版年：15 February, 2014

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