搜索页_ High power impulse magnetron sputtering (HiPIMS)

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在“Elsevier电子期刊”中，命中：140条，耗时：小于0.01 秒

在所有数据库中总计命中：56条

1.C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

作者：Jianliang Lin^a ; ^{Jianliang.lin@swri.org} ; Roman Chistyakov^b

关键词：Aluminum nitride (AlN) films ; Deep oscillation magnetron sputtering (DOMS) ; High power impulse magnetron sputtering (HiPIMS) ; C-axis orientation ; Piezoelectricity

刊名：Applied Surface Science

出版年：2017

2.AlTiCrN coatings deposited by hybrid HIPIMS/DC magnetron co-sputtering

作者：Hui Zhou^a ; Jun Zheng^a ; ^{zhengj510@163.com} ; Binhua Gui^a ; Dongsen Geng^b ; Qimin Wang^b

关键词：AlTiCrN coatings ; Hybrid coating process ; High power impulse magnetron sputtering ; Coating microstructure ; Tribological behavior

刊名：Vacuum

出版年：2017

3.HiPIMS-deposited thermochromic VO₂ films with high environmental stability

作者：S. Loquai ; B. Baloukas ; J.E. Klemberg-Sapieha ; L. Martinu

关键词：High power impulse magnetron sputtering ; Vanadium dioxide ; Thermochromism ; Durability ; Environmental stability

刊名：Solar Energy Materials and Solar Cells

出版年：2017

4.Dynamic transition in the discharge current between gas-dominant discharge and self-sputtering in high-power impulse magnetron sputtering

作者：Zhongzhen Wu^a ; ^{wuzz@pkusz.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Shu Xiao^a ; Zhengyong Ma^a ; Suihan Cui^a ; Feng Pan^a ; Xiubo Tian^a ; ^b ; Ricky K.Y. Fu^c ; ^{rickyfu@plasmatechnol.com" class="auth_mail" title="E-mail the corresponding author} ; Paul K. Chu^c

关键词：Discharge current ; High-power impulse magnetron sputtering ; Dynamic transition ; Temperature

刊名：Surface and Coatings Technology

出版年：2016

5.Protection of Si photocathode using TiO₂ deposited by high power impulse magnetron sputtering for H₂ evolution in alkaline media

作者：Dowon Bae^a ; Seyedmohammad Shayestehaminzadeh^b ; ¹ ; Einar B. Thorsteinsson^b ; Thomas Pedersen^c ; Ole Hansen^a ; ^c ; Brian Seger^a ; Peter C.K. Vesborg^a ; Sveinn Ó ; lafsson^b ; Ib Chorkendorff^a ; ^{ibchork@fysik.dtu.dk" class="auth_mail" title="E-mail the corresponding author}

关键词：Photocatalysis ; Titanium dioxide ; High power impulse magnetron sputtering ; Hydrogen evolution

刊名：Solar Energy Materials and Solar Cells

出版年：2016

6.Characteristics of metal-gate metal-insulator-semiconductor capacitor with ZrN capping layer fabricated by high-power impulse magnetron sputtering

作者：Jung-Ruey Tsai^a ; ^c ; Pi-Chun Juan^b ; ^{pcjuan@mail.muct.edu.tw" class="auth_mail" title="E-mail the corresponding author} ; Po-Jen Chen^a

关键词：High-k dielectrics ; ZrN ; ZrO2 ; High-power impulse magnetron sputtering ; HIPIMS ; Magnetron sputtering ; Metal-gate ; MIS capacitor

刊名：Thin Solid Films

出版年：2016

7.A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CN_x thin film growth with different inert gases

作者：Susann Schmidt^a ; ^{susann.schmidt@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Zsolt Czigá ; ny^b ; Jonas Wissting^a ; Grzegorz Greczynski^a ; Erik Janzé ; n^c ; Jens Jensen^a ; Ivan Gueorguiev Ivanov^c ; Lars Hultman^a

关键词：Magnetron sputtering ; Inert gases ; Plasma analysis ; Langmuir probe measurement ; CNx film stress ; CNx hardness

刊名：Diamond & Related Materials

出版年：2016

8.Microstructures and optoelectronic properties of Cu_xO films deposited by high-power impulse magnetron sputtering

作者：Hui Sun^a ; ^{hui.sun@utbm.fr" class="auth_mail" title="E-mail the corresponding author} ; Chao-Kuang Wen^b ; ^{d04527007@ntu.edu.tw" class="auth_mail" title="E-mail the corresponding author} ; Sheng-Chi Chen^c ; ^d ; ^{chensc@mail.mcut.edu.tw" class="auth_mail" title="E-mail the corresponding author} ; Tung-Han Chuang^b ; ^{tunghan@ntu.edu.tw" class="auth_mail" title="E-mail the corresponding author} ; Mohammad Arab Pour Yazdi^a ; ^{mohammad.arab-pour-yazdi@utbm.fr" class="auth_mail" title="E-mail the corresponding author} ; Frederic Sanchette^e ; ^f ; ^{frederic.sanchette@utt.fr" class="auth_mail" title="E-mail the corresponding author} ; Alain Billard^a ; ^g ; ^{alain.billard@utbm.fr" class="auth_mail" title="E-mail the corresponding author}

关键词：Cu2O thin film ; High-power impulse magnetron sputtering ; Optoelectronic properties ; Oxygen flow ratio

刊名：Journal of Alloys and Compounds

出版年：2016

9.The improvement of high power impulse magnetron sputtering performance by an external unbalanced magnetic field

作者：Chunwei Li^a ; ^b ; ^{lcwnefu@126.com" class="auth_mail" title="E-mail the corresponding author} ; Xiubo Tian^b ; ^{xiubotian@163.com" class="auth_mail" title="E-mail the corresponding author} ; Chunzhi Gong^b ; Jianping Xu^c

关键词：High power impulse magnetron sputtering ; External magnetic field ; Target discharge current ; Substrate ion current ; Optical emission spectroscopy

刊名：Vacuum

出版年：2016

10.Room temperature deposition of homogeneous, highly transparent and conductive Al-doped ZnO films by reactive high power impulse magnetron sputtering

作者：Martin Mickan^a ; ^b ; Ulf Helmersson^b ; Hervé ; Rinnert^a ; Jaafar Ghanbaja^a ; Dominique Muller^c ; David Horwat^a ; ^{david.horwat@univ-lorraine.fr" class="auth_mail" title="E-mail the corresponding author}

关键词：Transparent conducting oxide ; AZO ; Thin films ; Electronic properties ; HiPIMS

刊名：Solar Energy Materials and Solar Cells

出版年：2016

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